Institute for Microtechnology - REPORT 1991 - 2001

Contents
1             The First Decade                                                     7
2             The Institute                                                        9
3             Lectures and Seminars                                               13
4             Research and Development                                            15
    4.1    Simulation and Design                                                  15
      4.1.1OMEA, Mask Optimization                                                15
      4.1.2BICEPS, MST-CAD Environment                                            17
      4.1.3SUZANA, Etch Simulation                                                19
      4.1.4Computational Multi-Physics Analysis                                   21
    4.2    Process Technologies, Measurements                                     24
      4.2.1Laser Micromachining                                                   24
      4.2.2SU8-UV-Depth Lithography                                               28
      4.2.3SU8 Photo Epoxy for Compliant Micro Parts                              30
      4.2.43D-UV-Depth Lithography for Electroforming
           of Metallic Micro Structures                                           32
     4.2.5 Electroplating of Microstructures                                      34
     4.2.6 Friction Force Measurement on MEMS and Micro Components                36
    4.3       Sensors                                                             38
      4.3.1   3D - Acceleration Sensor                                            38
      4.3.2   Resonant Vibration Sensor                                           40
      4.3.3   Three-Axial Tactile Force Sensor                                    42
      4.3.4   Micromechanical Gyroscope                                           44
      4.3.5   Quartz Resonator                                                    46
      4.3.6   Pipe Flow Rate Measurement                                          48
      4.3.7   Belt Movement Sensor                                                50
    4.4       Actuators                                                           51
      4.4.1   SMA Actuated Micro Gripper                                          51
      4.4.2   Micro Pneumatic Actuator                                            53
      4.4.3   Variable Reluctance Micro Motor with 3-D Meander Coils
              and Horizontal Flux                                                 55
    4.5       Components                                                           58
      4.5.1   SU8-Micromechanical Structures with in Situ Fabricated Movable Parts 58
      4.5.2   Microcoils for MEMS                                                  61
      4.5.3   Micro Photometry                                                     63
                       Institute for Microtechnology - REPORT 1991 - 2001


    4.6       Systems                                                            65
      4.6.1   Alcoholmeter                                                       65
      4.6.2   SMA Multi-Actuator System                                          67
      4.6.3   Micro-Plasma-Reactor (MPR) for Abatement of Plasma Process Exhaust 70
      4.6.4   Automatic Groundwater Analysis System                              72
      4.6.5   System for Online Measurement of Distances
              in Motor Vehicles at Crash Tests                                   75
    4.7     Studies                                                             77
      4.7.1 Review of the State of Microsystem Technology in Lower Saxony       77
      4.7.2 Application of Microsystem Technology to Environmental Protection   78
5             Centre for Micro Production Braunschweig                          79
6             Publications                                                      81
    6.1       Books and Monographs                                              81
    6.2       Dissertations                                                     81
    6.3       Papers                                                            83
    6.4       Patents                                                           96